86-551-65146333
No. 110, Science Avenue, High-Tech Zone, Hefei, Anhui, China
| product number | BTF-1200C-4Zl-CVD |
| tube size | O.D50/60/80/100*1000mm(optional) |
| max.temperature | 1200℃(1 hour) |
| working temperature | ≤1100℃ |
| heating zone | 400mm |
| range ability of MFC | 100 ,200,200,500SCCM(standard gas is N2,range ability can be choosed) |
| temperature accuracy | +/-1C |
| vacuum lever | 5x10-1Pa |
| oil capacity | 0.7-1.1 liter |
| Name | CVD System 1200C Vacuum Tube Furnace |
| Product Keywords | Vertical CVD tube furnace |
CVD System 1200C Vacuum Tube Furnace with 4 Channels Mass Flowmeter Gas Cotrol and Lower Vacuum Unit
Product Description:
2.The technology of control circuit is vague PID automatic control with high precision temperature and operate easily.
3.The CVD growing-system can be used in CVD art,like carborundum substrate coating,conductivity test of ceramic film,controlled growth of Zno nanometer structure and MLCC atmosphere sintering experiment etc.
Parameter:
1200℃ single zone tube furnace BTF-1200C: | |
| Power | 3KW |
| Voltage | AC 208-240V 50/60HZ |
| Working temperature | Max. Temperature: 1200 °C (1 hour) Continuous working temperature: 1100 °C Suggested. Heating Rate:≤15°C /min |
| Zone length | Heating Zone Length:400mm Constant Temperature Zone: 200mm |
| Temperat controller |
|
| Heating element | Fe-Cr-Al Alloy doped by Mo |
| Processing tube | O.D60*1000mm(optional)
|
Standard accessories | quartz tube 1 pcs,stainless steel sealing flange 1set,silicon sealing ring 2set,high temperature glove1pair,quartz block 2sets. |
| Adopted accessories | quartz crucible 1pcs,quartz hook 1pcs,manual baffle valve 1pcs,corrugated pipe 1 pcs,vacuum gauge 1set,resistance monometer 1pcs and crucible hook 1pcs |
| Four channel Mass Gas Control GMF-4Z: | |
| Standard range ability | 100 ,200,200,500SCCM(standard gas is N2,range ability can be choosed) |
| Working environment | 5-45℃ |
| Pressure differential | 0.1~0.5 MPa |
| Max. pressure | 3MPa |
| Mixing tank | φ80*140mm |
| Accuracy | ±1.5% FS |
Vacuum pump:(optional) | |
| Product model | VAU-02 |
| Relative air humidity | ≤85% |
| Vacuum lever | 5*10-1pa |
| Pumping speed | 10m³/h |
| Pressure scope |
1.01325X105~1.33X10-2Pa |
| Power | 1KW |
| Voltage | 220V±10% 50~60HZ |
| Oil volume | 0.7-1.1Liter |
| Inlet &Outlet port | KF25 |
| Noisy | 50db |
| Size | 600×600×600mm |
| Connection | Use bellow pipe,manual baffle valve and clamp to connect |
Digital Vacuum Gauge: Gauge is installed on the vacuum flange (left side) of tube furnace and provides a wide measure range Accurate pressure reading with any mixed gases
| |
| Vacuum gauge | ZJ-52T resistance gauge |
| Mearsurement range | 1×10 5 ~1×10 -1 Pa |
| Control range | 5×10 3 ~5×10-1 Pa |
| Control way | Output through relay contact,load capacity is AC220V/3A(or DC28V/3A) noninductive load |
| Power | 20W |
| Voltage | 90-260V/50Hz or 220V ± 10% 50Hz |
Anhui Beq Equipment Technology Co., Ltd.
Anhui Beq Equipment Technology Co., Ltd.
Anhui BEQ Equipment technology CO.,LTD(BEQ company) is professional in producing kinds of material prepsration equipment.As the requirement of old customers,we combine research and produce together.Under the work of all BEQers, we are becoming a professional equipment supplier in this special field. We own a number of returnees and experts of the material field.
INTERNATIONAL AIR MAIL
We supply equipment the output can be from Lab to pilot scale test and industry producing.
We supply multi-function Lab.You can try by yourself or post to test for free in Lab.
We supply the complete services,We will arrange for you!
We supply the maintance serve for our products to settle the problem of the after-sale.
We supply the maintenance serve for our products to settle the problem of the after-sale.
We accept small amount production, and the Minimal order quantity is one set.
We supply multi-function Lab.You can try by yourself or post to test for free in Lab.
We supply the complete services,We will arrange for you!
