Main features:
1.This gas-supply system can control mixed ratio of multiple gas according to the different flow and can be installed air-washing instrument.The mass folwmeter is installed in the sealing moveable cabinet which is connected from clean double parabolic stainless steel tube and precision double cutting ferrule connector .
2.This strument can be used in low vacuum small flowmeter,single gas or mixed gas environment.Especial for switch using of multiple gases.
3.Gas pressure and float data can be seen in the same plane.It is easy to operate with good apperance.It is accurate to see the float and the gas consumption can be controlled effectly.
4.The connection of instrument and valve is connected by moveable joint.It is easy to disassemble.This equipment,all kinds of vacuum tube furnace (BEQ brand)and vacuum unit can be formed the CVD system.
Specification:
Product model | GMF-1Z-1F |
Float flowmeter
| 10-100ml/min; 16-160ml/min;25-250ml/min
(the float can be customized) |
Power | 18W |
Voltage | 185~245V 50HZ |
Vacuum pressure gauge range ability | -0.1-0.15MPa(0.01MPa/grid) |
Needle valve | 316 stainless steel |
Standard flowmeter range ability(N2) | 100sccm ,200sccm ,500sccm
(range ability can be choosed) |
Working temperature | 5~45ºC |
Working pressure range | 0.1~0.5MPa |
Max.pressure | 3MPa |
Accuracy | ±1.5% FS |
Mixed-gas tank | Φ80×120mm |
Global valve | Φ6mm 316stainless steel needle valve |
Dimension | 600*600*650mm |
